Ein Programmpaket zur Modellierung kapazitiver MEMS-Drehratensensoren (A Software Tool for the Modeling of Capacitive MEMS Gyroscopes)
نویسندگان
چکیده
This article presents a software tool to automatically generate the mathematical model of capacitive MEMS gyroscopes in a symbolic form. After describing the operational principle of a specific one-axis gyroscope with capacitive drive actuators and capacitive sensors, a mathematical concept is presented that allows for the systematic description of a certain class of capacitive MEMS gyroscopes. The resulting system of differential equations can be used for controller design and further analysis within the computer algebra program MAPLE. Additionally, an automatic C code generator provides a link to the numeric simulation environment MATLAB/SIMULINK.
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ورودعنوان ژورنال:
- Automatisierungstechnik
دوره 58 شماره
صفحات -
تاریخ انتشار 2010